Arc Precision Gmbh : new deposition source for micro and nano technology / Hans-Herman Schneider. 2004.

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Arc Precision Gmbh : new deposition source for micro and nano technology / Hans-Herman Schneider. 2004.

1 v. (unpaged) : ill. ; 30 cm.

Related Entities

There are 3 Entities related to this resource.

Schneider, Hans-Herman.

http://n2t.net/ark:/99166/w6k680nq (person)

Arc Precision Gmbh.

http://n2t.net/ark:/99166/w6x14q16 (corporateBody)

Data Storage Institute

http://n2t.net/ark:/99166/w6qp1j7c (corporateBody)